Factory-direct fused quartzware precision-machined in Donghai, China. Certified purity ≥99.99%, helium leak-tested, and custom-fabricated to OEM technical drawings.
A critical guide for semiconductor process engineers, optical scientists, and B2B procurement leaders sourcing precision quartz substrates.
In high-temperature wafer fabrication, DUV photolithography, and analytical laser systems, precision quartz plates serve as critical structural and optical elements. Chemically consisting of non-crystalline silicon dioxide (SiO₂), industrial fused quartz and synthetic fused silica exhibit physical characteristics that cannot be matched by standard borosilicate or soda-lime glass: an extremely low coefficient of thermal expansion (CTE of 5.5 × 10⁻⁷/K), continuous operating thermal resilience reaching 1100°C, an exceptionally broad transmission spectrum from deep ultraviolet (185 nm) through mid-infrared (2500 nm), and supreme chemical inertness against concentrated acids.
As a specialized wholesale manufacturer, Southeast Quartz operates proprietary plasma melting, double-sided chemical mechanical polishing (CMP), and CNC five-axis ultrasonic machining lines in Donghai, Jiangsu. Selecting the correct grade of fused silica plate is vital to preventing wafer contamination, beam distortion, or premature devitrification under intense cyclic loading.
JGS1 (Synthetic Fused Silica): Produced by vapor-phase flame hydrolysis of high-purity silicon tetrachloride (SiCl₄). JGS1 contains virtually zero metallic impurities (total metallic impurities < 0.5 ppm) and is completely bubble-free. It provides high optical transmittance in the ultraviolet spectrum (down to 185 nm) and exhibits minimal fluorescence under 248 nm / 193 nm excimer lasers. Typical applications: photolithography photomasks, laser windows, and optical flats.
JGS2 (Optical Grade Fused Quartz): Synthesized by melting natural high-purity quartz crystal sand in vacuum induction or plasma furnaces. JGS2 exhibits high optical transmission across the visible and near-infrared range (220 nm – 2500 nm). While containing minor hydroxyl (OH) groups, it delivers cost-effective mechanical and thermal durability for solar cell wafer carriers, observation viewports, and UV curing beds.
JGS3 (Infrared Optical Fused Silica): Produced by vacuum electro-fusion or plasma-fused processes with targeted dehydroxylation, yielding an OH content < 2–5 ppm. By eliminating the deep water-absorption band at 2.73 μm, JGS3 guarantees high transmission through the infrared spectrum up to 3.5–4.0 μm. Ideal for military-grade infrared thermal pyrometers, FTIR spectrometers, and CVD chamber observation windows.
Dimensional tolerances and micro-surface topology dictate product yield in modern fab setups. Wholesale precision quartz plates manufactured by Southeast Quartz achieve optical flatness reaching λ/10 (λ = 632.8 nm), parallelism within ≤5 arc seconds, and surface roughness Ra down to 0.3 nm (super-polished). Each substrate undergoes laser interferometry, ultrasonic degreasing in Class 1000 cleanrooms, and comprehensive ICP-MS spectrometry analysis before export delivery.
| Property Parameter | JGS1 (Synthetic Silica) | JGS2 (Optical Quartz) | JGS3 (IR Fused Silica) | Testing Standard |
|---|---|---|---|---|
| SiO₂ Purity Grade | ≥ 99.9999% (< 0.5 ppm metal) | ≥ 99.995% | ≥ 99.99% | GDMS / ICP-MS |
| Usable Transmission Band | 185 nm – 2500 nm (DUV-Vis) | 220 nm – 2500 nm (UV-NIR) | 260 nm – 3500 nm (IR Optimized) | Varian Cary 5000 |
| Hydroxyl (OH⁻) Content | ≤ 1200 ppm (or < 20 ppm dry) | 150 – 200 ppm | ≤ 2 – 5 ppm (Water-free) | FTIR Spectroscopy |
| Coefficient of Thermal Expansion | 5.4 × 10⁻⁷ / K (0–300°C) | 5.5 × 10⁻⁷ / K (0–300°C) | 5.5 × 10⁻⁷ / K (0–300°C) | ASTM E228 Dilatometry |
| Maximum Working Temperature | 1100°C (Continuous) / 1250°C (Peak) | 1150°C (Continuous) / 1300°C (Peak) | 1150°C (Continuous) / 1300°C (Peak) | Thermal Shock Oven |
| Surface Roughness (Ra) | Down to Ra ≤ 0.3 nm (3 Å) | Ra 0.5 – 1.0 nm | Ra 0.5 – 1.2 nm | Zygo Optical Profiler |
| Flatness / Wavefront Error | λ/4 to λ/10 per inch | λ/2 to λ/4 per inch | λ/2 to λ/4 per inch | He-Ne Laser Interferometer |
| Bubble & Inclusion Class | Class 0 (Zero bubbles/pores) | Class 1 (DIN 58927 / ISO 10110) | Class 1 / Class 2 | Cross-Polarized Optical |
How Southeast Quartz combines geographical raw-material integration with advanced manufacturing to deliver cost efficiency and rapid lead times.
Situated in Donghai County, Jiangsu Province—China's renowned quartz capital—we maintain direct access to vast regional purification and natural quartz ingot supply lines. By controlling the entire value chain from granular purification to plasma fusion, we eliminate middleman overhead and ensure lot-to-lot material traceability.
Our standardized production plants deploy multi-axis CNC milling centers, diamond wire multi-saws, abrasive waterjet cutting tables, and proprietary flame glassblowing lathes. This comprehensive setup enables us to transition from rough-sawn quartz slabs to custom profiled, grooved, stepped, and hole-drilled plates without subcontracting delays.
Global procurement teams face increasing pressures to optimize cost-per-part without compromising fab cleanroom protocols. Compared to Western European or Japanese fabricators, our vertically integrated manufacturing reduces wholesale production costs by 30% to 45% while adhering rigorously to ASTM, SEMI, and ISO quality management systems.
From SEMI S2/S8 standards to customized supply-chain consignment programs, we ensure smooth procurement for Tier-1 fabs and optical OEMs worldwide.
Every wholesale shipment is accompanied by a Certificate of Analysis (CoA), full 3D CMM coordinate inspection reports, Zygo interferometer wavefront interferograms, and spectroscopic optical transmission curves. All raw quartz lots are cataloged with raw batch ingot numbers.
Our fused quartz components strictly satisfy EU RoHS 2011/65/EU and REACH (EC 1907/2006) regulations, containing zero heavy metals, polybrominated biphenyls, or hazardous plasticizers. We operate in accordance with Responsible Minerals Initiative (RMI) guidelines.
For key enterprise accounts across North America, the European Union, and Southeast Asia, Southeast Quartz provides safety-stock buffer warehousing and vendor-managed inventory (VMI) frameworks, reducing replenishment cycles from weeks to 48-hour domestic dispatch.
Our dedicated bilingual Field Application Engineers (FAE) review CAD drawings (STEP, DWG, DXF, PDF), provide DFM (Design for Manufacturability) insights, and suggest optimal bevel radii, edge polishing grades, and mounting tolerances tailored to your thermal profiles.
Where precision quartz plates deliver structural, optical, and thermal reliability under aggressive fab chemistry and ultra-high heat.
Precision quartz plates serve as wafer support plates, end caps, baffle covers, and dielectric isolation plates inside Rapid Thermal Processing (RTP), Chemical Vapor Deposition (CVD), and diffusion furnace chambers. The absolute metal purity prevents heavy metal ion migration (e.g., Fe, Cu, Ni) into silicon crystal structures at 1000°C+.
In high-efficiency TOPCon and Heterojunction (HJT) solar cell production lines, large-scale precision quartz plates function as furnace muffle covers, thermal shields, and carrier cover plates. Excellent thermal shock resistance prevents cracking during high-speed mechanical loading and automated boat cycling.
JGS1 synthetic fused silica windows are utilized for 193 nm ArF and 248 nm KrF excimer laser path windows, industrial laser cutting heads, and ultra-high vacuum (UHV) observation viewports. The negligible inclusion density ensures a high laser damage threshold (LDT > 25 J/cm² @ 1064 nm, 10 ns).
Precision-ground and polished quartz plates serve as baseline substrates for lab-on-a-chip capillary electrophoresis, UV-Vis spectrophotometer cuvettes, and biochip flow cells. Strong optical transparency into the deep UV enables accurate DNA/RNA quantitative absorption spectroscopy at 260 nm without background autofluorescence.
Engineered to withstand deep marine hydrostatic pressures and aerospace thermal differentials. Our optical quartz discs and rectangular plates maintain structural integrity under differential pressures exceeding 150 bar, providing clear optical monitoring in combustion engines, oil & gas autoclaves, and space simulation chambers.
As lithography nodes advance below 3 nm and display substrates scale up, quartz fabrication technologies must evolve rapidly.
Sub-nanometer chemical mechanical planarization (CMP) is now required for EUV and DUV lithography photomasks. Southeast Quartz is implementing multi-stage magneto-rheological finishing (MRF) to eliminate sub-surface damage (SSD), achieving surface roughness values below Ra 0.2 nm across 300 mm aperture formats.
Generation 8.5 and 10.5 OLED display production, combined with 300 mm / 450 mm semiconductor equipment, demands oversized monolithic quartz plates exceeding 1200 mm × 1200 mm without thermal fusion seams. We have expanded our vertical electric fusion furnaces to support jumbo-sized optical blanks.
With high-power fiber lasers reaching 50 kW–100 kW outputs, internal OH radicals produce catastrophic thermal lensing. Our proprietary low-OH plasma dehydroxylation processes reduce OH absorption lines to below 1.5 ppm, driving up damage thresholds for industrial laser cutting and defense tracking.
Answers to common engineering inquiries regarding material selection, dimensional tolerances, thermal shock resistance, and wholesale shipping.
Complete your equipment bill of materials with our precision quartz tubes, rods, plates, and customized process components.
Send us your technical drawings (PDF, STEP, DWG) and process specifications. Our optical glass technologists and quartz manufacturing engineers will review your tolerances and confirm manufacturability, material grade, and pricing within 24 hours.
